High-Resolution Scanning Electron Microscope Displays 3D Surface Images

A high-resolution scanning electron microscope (SEM) displays three-dimensional (3D) surface images at various angles and at subnanometer resolutions (the size of a row of 10 hydrogen atoms).

The extreme high resolution (XHR-SEM) is the latest member of the Magellan family of microscopes produced by Fei (Tokyo, Japan). It enables laboratory personnel to quickly see things they could not see before. The Magellan family's performance derives from the integration of new electron optical elements, proprietary electron gun technology, a highly accurate five-axis piezo-ceramic stage, and high stability platform with fully configurable analytic chamber. The stage readily accommodates large samples or multiple smaller samples, while providing fast, accurate navigation, and excellent stability.


Used for monitoring, process development, and control applications in advanced semiconductor manufacturing, the Magellan range of systems extends its capability to applications that were previously impossible or impractical with conventional SEM, transmission electron microscope (TEM), or focused ion beam (FIB) systems.

The Magellan family comes in two models: the Magellan 400 is optimized for scientific labs and the Magellan 400L is optimized for semiconductor labs. Both models have an optional, full environmental enclosure to isolate the instrument from thermal and acoustic interferences, ensuring peak performance while relaxing site requirements and facility preparation costs.

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