Super-Resolution X-Ray Microscope Enables Observation of Cellular Interior

A novel super-resolution X-ray microscope combines the high penetration power of X-rays with high spatial resolution, making it possible for the first time to observe the detailed interior composition of cellular structures and semiconductor devices.

The new instrument uses a Megapixel Pilatus (a silicone pixel detector), which is able to count millions of single X-ray photons over a large area. This key feature makes it possible to record detailed diffraction patterns while the sample is raster-scanned through the focal spot of the beam. In contrast, conventional X-ray scanning microscopes measure only the total transmitted intensity.

Conventional electron scanning microscopes can provide high-resolution images, but usually only for the surface of the specimen, which must be kept in a vacuum. The new super-resolution microscope permits scientists to look deeply into biologic samples or semiconductors without altering them. It can be used to non-destructively characterize nanometer defects in buried semiconductor devices and to help improve the production and performance of future semiconductor devices with sub-hundred-nanometer features.

The penetration power of X-rays can be used to investigate embedded cells or sub-cellular structures. The approach can also be transferred to electron or visible laser light, and help in the design of new and better light and electron microscopes.

The microscope was developed by a team of scientists from the Paul Scherrer Institut (PSI; Villigen PSI, Switzerland) and the Ecole Polytechnique Fédérale de Lausanne (EPFL; Lausanne, Switzerland). Scientists have been working on super-resolution microscopy concepts for electrons and X-rays for many years. EPFL professor and team leader Franz Pfeiffer said, "Only the construction of a dedicated multi-million Swiss-franc instrument at PSI's Swiss Light Source allowed us to achieve the stability that is necessary to implement our novel method in practice.”


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Paul Scherrer Institut
Ecole Polytechnique Fédérale de Lausanne